-
題名:“Self-heating induced instability of oxide thin film transistors under dynamic stress ”,
著者:Kahori Kise, Mami N. Fujii, Satoshi Urakawa, Haruka Yamazaki, Emi Kawashima, Shigekazu Tomai, Koki Yano, Dapeng Wang, Mamoru Furuta, Yasuaki Ishikawa, and Yukiharu Uraoka
-
題名:“Silver oxide Schottky contacts and metal semiconductor field-effect transistors on SnO2 thin films ”,
著者:Giang T. Dang, Takayuki Uchida, Toshiyuki Kawaharamura, Mamoru Furuta, Adam R. Hyndman, Rodrigo Martinez, Shizuo Fujita, Roger J. Reeves and Martin W. Allen
-
題名:“(Invited) Low-Temperature Processed and Self-Aligned InGaZnO Thin-Film Transistor with an Organic Gate Insulator for Flexible Device Applications ”,
著者:Mamoru Furuta, Tatsuya Toda, Gengo Tatsuoka and Yusaku Magari
-
題名:“Low-Temperature Processed Metal-Semiconductor Field-Effect Transistor with In-Ga-Zn-O/AgOx Schottky Gate ”,
著者:Yusaku Magari, Shinsuke Hashimoto, Kenichiro Hamada and Mamoru Furuta
-
題名:“Suppression of Negative Gate Bias and Illumination Stress Degradation by Fluorine-Passivated In-Ga-Zn-O Thin-Film Transistors ”,
著者:Mamoru Furuta, Jingxin Jiang, Mai Phi Hung, Tatsuya Toda, Dapeng Wang and Gengo Tatsuoka
-
題名:“Anomalous Increase in Field-Effect Mobility in In–Ga–Zn–O Thin-Film Transistors Caused by Dry-Etching Damage Through Etch-Stop Layer ”,
著者:Daichi Koretomo, Tatsuya Toda, Tokiyoshi Matsuda, Mutsumi Kimura, and Mamoru Furuta
-
題名:“Investigation of Carrier Generation Mechanism in Fluorine-Doped n+-In–Ga–Zn-O for Self-Aligned Thin-Film Transistors ”,
著者: Dapeng Wang, Jingxin Jiang, and Mamoru Furuta
-
題名:“High-Performance Top-Gate and Self-Aligned In–Ga–Zn-O Thin-Film Transistor Using Coatable Organic Insulators Fabricated at 150 °C ”,
著者: Tatsuya Toda, Gengo Tatsuoka, Yusaku Magari, and Mamoru Furuta
-
題名:“Image Sensor with Organic Photoconductive Films by Stacking Red/Green and Blue Components ”,
著者: T. Takagi, H. Seo, T. Sakai, H. Ohtake, and Mamoru Furuta
-
題名:“Water-triggered macroscopic structural transformation of a metal-organic framework ”,
著者: M. Ohtani, K. Takase, P. Wang, K. Higashi, K. Ueno, N. Yasuda, K. Sugimoto, M. Furuta, and K. Kobiro
-
題名:“Quantitative Analysis of the Effect of Hydrogen Diffusion from Silicon Oxide Etch-Stopper Layer into Amorphous In–Ga–Zn–O on Thin-Film Transistor”,
著者: Tatsuya Toda, Dapeng Wang, Jingxin Jiang, Mai Phi Hung and Mamoru Furuta
-
題名:“Highly stable fluorine-passivated In–Ga–Zn–O thin-film transistors under positive gate bias and temperature stress”,
著者: Jingxin Jiang, Tatsuya Toda, Mai Phi Hung, Dapeng Wang and Mamoru Furuta
-
題名:“Quantitative Analysis of Hole-Trapping and Defect-Creation in InGaZnO Thin-Film Transistor under Negative-Bias and Illumination-Stress”,
著者: Mai Phi Hung, Dapeng Wang, Tasuya Toda, Jingxin Jiang and Mamoru Furuta
-
題名:“Drain Bias Effect on the Instability of Amorphous InGaZnO Thin-Film Transistors under Negative Gate Bias and Illumination Stress”,
著者:Dapeng Wang, Mai Phi Hung, Jingxin Jiang, Tatsuya Toda and Mamoru Furuta
-
題名:“Improvement of Electrical Properties and Bias Stability of InGaZnO Thin-Film Transistors by Fluorinated Silicon Nitride Passivation ”,
著者: Jingxin Jiang, Toda Tatsuya, Gengo Tatsuoka, Dapeng Wang and Mamoru Furuta
-
題名:“Self-Aligned Bottom-Gate In-Ga-Zn-O Thin-Film Transistor with Source/Drain Regions Formed by Selective Deposition of Fluorinated SiNx Passivation ”,
著者: Mamoru Furuta, Jingxin Jiang, Gengo Tatsuoka and Dapeng Wang
-
題名:“Self-Aligned Bottom-Gate In-Ga-Zn-O Thin-Film Transistor with Source/Drain Regions Formed by Direct Deposition of Fluorinated Silicon Nitride ”,
著者: Jingxin Jiang, Mamoru FUruta and Dapeng Wang
-
題名:“Fabrication of Zinc Oxide Nanostructures by Mist Chemical Vapor Deposition ”,
著者: X. Li, C. Li, T. Kawaharamura, D. Wang, N. Nitta, M. Furuta, H. Furuta, and A. Hatta
-
題名:“Ultrasonic-assisted mist chemical vapor deposition of II-oxide and related oxide compounds ”,
著者: Shizuo Fujita, Kentaro Kaneko, Takumi Ikenoue, Toshiyuki Kawaharamura and Mamoru Furuta
-
題名:“Suppression of degradation induced by negative gate bias and illumination stress in amorphous InGaZnO thin-film transistor by applying negative drain bias ”,
著者: Dapeng Wang, Mai Phi Hung, Jingxin Jiang, Tatsuya Toda, and Mamoru Furuta
-
題名:“Low temperature deposition of SiOx insulator film with newly developed facing electrodes chemical vapor deposition ”,
著者: T. Matsuda, M. Furuta, T. Hiramatsu, H. Furuta, T. Kawaharamura, and T. Hirao
-
題名:“High performance solution-processed InGaZnO thin-film Transistor fabricated by ozone-assisted atmospheric pressure mist deposition ”,
著者: Dapeng Wang, Mai Phi Hung, Jingxin Jiang, Tatsuya Toda, and Mamoru Furuta
-
題名:“Effect of drain bias on negative gate bias and illumination stress induced degradation in amorphous InGaZnO thin-film transistors ”,
著者: Dapeng Wang, Mai Phi Hung, Jingxin Jiang, Tatsuya Toda, Chaoyang Li and Mamoru Furuta
-
題名:“Influence of Substrates on Formation of Zinc Oxide Nanostructures by a Novel Reducing Annealing Method ”,
著者: Li, Xin; Li, Chaoyang; Kawaharamura, Toshiyuki; Wang, Dapeng; Nitta, Noriko; Furuta, Mamoru; Furuta, Hiroshi; Hatta, Akimitsu
-
題名:“Negative bias illumination stress induced electron trapping at back-channel interface of InGaZnO thin-film transistor ”,
著者: Mai Phi Hung, Dapeng Wang, Jingxin Jiang and Mamoru Furuta
-
題名:“(Invited) Negative-Bias with Illumination Stress Induced State Creation in Amorphous InGaZnO Thin-Film Transistor ”,
著者:M. Furuta, M.-P. Hung, J. Jiang, D. Wang, S. Tomai, H. Hayasaka, and K. Yano
-
題名:“Trap Densities in ZnO TFTs with SiNx/SiOx Stacked Gate Insulators Fabricated Using Several N2O Flow Rate during SiOx Deposition ”,
著者:M. Kimura, T. Matsuda, M. Furuta, T. Hiramatsu, H. Furuta, C. Li, T. Hirao, Y. Kamada, and S. Fujita
-
題名:“Thin-Film Transistor Using Dielectrophoretic Assembly of Single-Walled Carbon Nanotubes ”,
著者:T. Toda, T. Kawaharamura, H. Frusawa, and M. Furuta
-
題名:“A-InGaZnO Thin-Film Transistor with Non-Vacuum Processed InGaZnO/AlOx Gate Dielectric Stack ”,
著者:M. Furuta, T. Kawaharamura, T. Toda, and D. Wang
-
題名:“Thin-Film Transistors Using Uniform and Well-Aligned Single-Walled Carbon Nanotubes Channels by Dielectrophoretic Assembly”,
著者:T. Toda, H. Frusawa, and M. Furuta
-
題名:“Thermal analysis of amorphous oxide thin-film transistor degraded by combination of joule heating and hot carrier effect”,
著者:Satoshi Urakawa, Shigekazu Tomai, Yoshihiro Ueoka, Haruka Yamazaki, Masashi Kasami, Koki Yano, Dapeng Wang, Mamoru Furuta, Masahiro Horita Yasuaki Ishikawa and Yukiharu Uraoka
-
題名:“Thermal distribution in amorphous InSnZnO thin-film transistor”,
著者:Satoshi Urakawa, Shigekazu Tomai, Yoshihiro Ueoka, Haruka Yamazaki, Masashi Kasami, Koki Yano, Dapeng Wang, Mamoru Furuta, Masahiro Horita Yasuaki Ishikawa and Yukiharu Uraoka
-
題名:“Enhancing carrier mobility of IGZO TFT fabricated by non-vacuum mist CVD with O3 assistance”,
著者:Toshiyuki Kawaharamura, Takayuki Uchida, Dapeng Wang, Masaru Sanada, and Mamoru Furuta
-
題名:“Growth and electrical properties of AlOx grown by mist chemical vapor deposition”,
著者:Toshiyuki Kawaharamura, Takayuki Uchida, Masaru Sanada, and Mamoru Furuta
-
題名:“The Deterioration Phenomenon of Amorphous InSnZnO Transistors Derived from the Process of Annealing”,
著者:Shigekazu Tomai, Hiromi Hayasaka, Misa Sunagawa, Emi Kawashima, Susumu Ishii, Mami Nishimura, Masashi Kasami, Koki Yano, Dapeng Wang and Mamoru Furuta
-
題名:“Stoichiometry Control of ZnO Thin Film by Adjusting Working Gas Ratio during Radio Frequency Magnetron Sputtering”,
著者:Chaoyang Li, Dapeng Wang, Zeming Li, Xin Li, Toshiyuki Kawaharamura and Mamoru Furuta
-
題名:“ミストCVD法によるAlOx薄膜作製に対するO3支援の効果”,
著者:内田 貴之, 川原村 敏幸, 古田 守, 眞田 克
-
題名:“Photo Induced Negative Bias Instability of Zinc Oxide Thin-Film Transistors”,
著者:S. Shimakawa, D. Wang, and M. Furuta
誌名:Japanese Journal of Applied Physiscs, 51 (2012) 108003
-
題名:“Electrical properties of thin-film transistors with an indium gallium zinc oxide channel and aluminium oxide gate dielectric stack formed by solution-based atmospheric pressure chemical vapor deposition”,
著者:M. Furuta, T. Kawaharamura, D. Wang, T. Hirao, T. Toda, and G. T. Dang
誌名:IEEE Electron Devices Letters, 33 (2012) pp.851-853
-
題名:“Crystallization Using Biomineralized Nickel Nanodots of Amorphous Silicon Thick Films Deposited by Chemical Vapor Deposition, Sputtering and Electron Beam Evaporation”,
著者:T. Nishida, K. Fuse, M. Furuta, Y. Ishikawa, and Y. Uraoka
誌名:Japanese Journal of Applied Physics, 51 (2012) 03CA01
-
題名:“Successful Growth of Conductive Highly Crystalline Sn-Doped a-Ga2O3 Thin Films by Fine-Channel Mist Chemical Vapor Deposition”,
著者:T. Kawaharamura, G. T. Dang, and M. Furuta
誌名:Japanese Journal of Applied Physics, 51 (2012) 040207
-
題名:“Photoleakage current of TFTs with ZnO channels formed at various oxygen partial pressure under visible light irradiation”,
著者:S. Shimakawa, Y. Kamada, T. Kawaharamura, D. Wang, C. Li, S. Fujita, and T. Hirao, and M. Furuta,
誌名:Japanese Journal of Applied Physics, 51 (2012) 03CB04
-
題名:“Well-arrayed ZnO nanostructure formed by multi-annealing processes at low temperature”,
著者:D. Wang, Z. Li, T. Kawaharamura, M. Furuta, T. Narusawa, and C. Li,
誌名:J. Phys. Status Solidi C, 9 (2012) pp.194-197
-
題名:“A 128×96 Pixel, 50 m Pixel Pitch Transparent Readout Circuit using InGaZnO4 Thin Film Transistor Array with Indium-Tin-Oxide Eletrodes for Organic Image Sensor”,
著者:T. Sakai, H. Seo, S. Aihara, M. Kubota, N. Egami, D. Wang, and M. Furuta,
誌名:Japanese Journal of Applied Physics, 51 (2012) 010202
-
題名:“Photocurrent and Persistent Photoconductivity in Zinc Oxide Thin-Film Transistors under Ultraviolet-Light Irradiation”,
著者:M. Furuta, Y. Kamada, M. Kimura, S. Shimakawa, T. Kawaharamura, S. Wang, C. Li, S. Fujita, and T. Hirao,
誌名:Japanese Journal of Applied Physics, 50 (2011) 110204
-
題名:“Control of Swelling Height of Si Crystal by Irradiating Ar Beam”,
著者:S. Momota, J. Zhang, T. Toyonaga, H. Terauchi, K. Maedam J. Taniguchi, T. Hirao, M. Furuta, and T. Kawaharamura,
誌名:Journal of Nanoscience and Nanotechnology, Accepted (2011)
-
題名“Study on Oxygen Source and Its Effect on Film Properties of ZnO Deposited by Radio Frequency Magnetron Sputtering”
著者:Y. Kamada, M. Furuta, T. Hiramatsu, T. Kawaharamura, D. Wang, S. Shimakawa, C. Li, S. Fujita, and T. Hirao,
誌名:Applied Surface Science, 258 (2011) pp.695-699.
-
題名:“Extraction of Trap Densities in ZnO Thin-film Transistors and Dependence on Oxygen Partial Pressures during Sputtering of ZnO Films”,
著者:M. Kimura, M. Furuta, Y. Kamada, T. Hiramatsu, T. Matsuda, H. Furuta, C. Li, S. Fujita, and T. Hirao
誌名:IEEE Trans. Electron Devices, 58 (2011) pp. 3018~3024.
-
題名:“ZnO Thin-Film Transistors with SiNx/SiOx Stacked Gate Insulators: Trap Densities and N2O Flow Rate Dependence”,
著者:M. Kimura, M. Furuta, Y. Kamada, T. Hiramatsu, T. Matsuda, H. Furuta, C. Li, S. Fujita, and T. Hirao
誌名:Electrochem. Solid-State Lett., 14 (2011) pp. H365~H367.
-
題名:“Influence of Sputtering Pressure on Band Gap of Zn1-xMgxO Thin Film Prepared by Radio Frequency Magnetron Sputtering”
著者:D. Wang, T. Narusawa, T. Kawaharamura, M. Furuta, and C. Li
誌名:Journal of Vacuum Science and Technology B, 29(5) (2011) 051205.
-
題名:“Trap Densities in ZnO Thin-Film Transistors with SiOx Gate Insulators by Several Deposition Conditions”,
著者:M. Kimura, M. Furuta, Y. Kamada, T. Hiramatsu, T. Matsuda, H. Furuta, C. Li, S. Fujita, and T. Hirao,
誌名:Electrochemical and Solid-State Letters, 14 (2011) pp. H365-H367
-
題名:“Effect of Chemical Stoichiometry of Channel Region on Bias Instability in ZnO Thin-film Transistors”,
著者:Y. Kamada, S. Fujita, M. Kimura, T. Hiramatsu, T. Matsuda, M. Furuta, and T. Hirao
誌名:Applied Physics Letters, 98, (2011) 103512
-
題名:“Reduction of Photo-Leakage Current in ZnO Thin-Film Transistors with Dual-Gate Structure“
著者:Y. Kamada, S. Fujita, M. Kimura, T. Hiramatsu, T. Matsuda, M. Furuta, and T. Hirao,
誌名:IEEE Electron Device Letters, 32, (2011) pp. 509-511
-
題名:“Positive Bias Instability of Bottom-Gate Zinc Oxide Thin-Film Transistors (ZnO TFTs) with a SiOx/SiNx Stacked Gate Insulator”,
著者:M. Furuta, Y. Kamada, T. Hiramatsu, C. Li, M. Kimura, S. Fujita, and T. Hirao,
誌名:Japanese Journal of Applied Physics, 50, (2011) 03CB09
-
題名:“Behavior of Oxygen in Zinc Oxide Films Through Thermal Annealing and Its Effect on Sheet Resistance”,
著者:T. Hiramatsu, M. Furuta, T. Matsuda, C. Li, and T. Hirao
誌名:Applied Surface Science, 257, (2011) pp. 5480-5483
-
題名:“A 128×96 Pixel Stacked-Type Color Image Sensor: Stack of Individual Blue-, Green-, and Red-Sensitive Organic Photoconductive Films Integrated with a ZnO Thin-Film Transistor Readout Circuit”,
著者:H. Seo, S. Aihara, T. Watabe, H. Ohtake, T. Sakai, M. Kubota, N. Egami, T. Hiramatsu, M. Furuta, and T. Hirao
誌名:Japanese Journal of Applied Physics, 50, (2011) 024103
-
題名:“Influence of Substrate Bias Voltage on Optical and Structural Characteristics of Zinc Oxide Films Prepared by Radio Frequency Magnetron Sputtering,”
著者:C. Li, T. Hiramatsu, T. Matsuda, M. Furuta, and T. Hirao,
誌名:International Journal of Materials Engineering and Technology, 4, (2010) pp. 39~47
-
題名:“Mechanism Analysis of Photoleakage Current in ZnO Thin-Film Transistors using Device Simulation”
著者:M. Kimura, Y. Kamada, S. Fujita, T. Hiramatsu, T. Matsuda, M. Furuta, and T. Hirao
誌名:Applied Physics Letters, 97, (2010) 163503
-
題名:“Analysis of Hump Characteristics in Thin-Film Transistors with ZnO Channel Deposited by Sputtering under Various Oxygen Partial Pressures”,
著者:M. Furuta, Y. Kamada, M. Kimura, T. Hiramatsu, T. Matsuda, C. Li, S. Fujita, and T. Hirao,
誌名:IEEE Electron Device Letters, 31, (2010) pp. 1257-1259
-
題名:“Crystal Structure Analysis of Multi-Walled Carbon Nanotube Forests by Newly Developed Cross-Sectional XRD measurements”,
著者:H. Furuta, T. Kawaharamura, M. Furuta, K. Kawabata, and T. Hirao, T. Komukai, K. Yoshihara, Y. Shimomoto, and T. Oguchi,
誌名:Applied Physics Express(APEX), 3, (2010) 105101
-
題名:“Uniformity and Stability in Zinc Oxide Thin-Film Transistors (ZnO TFTs)”,
著者:M. Furuta, M. Kimura, T. Hiramatsu, T. Nakanishi, C. Li, and T. Hirao,
誌名:Journal of Society for Information Display, 18/10, (2010) pp. 773-778
-
題名:“Analysis of Subthreshold Photo-Leakage Current in ZnO Thin-Film Transistors using Indium-Ion Implantation”,
著者:Y. Kamada, S. Fujita, T. Hiramatsu, T. Matsuda, M. Furuta, and T. Hirao,
誌名:Solid State Electronics, 54, (2010) pp. 1392-1397
-
題名:“Simulation Study of In-plane Type Triode Carbon Nanotube Emitter”,
著者:H. Furuta, K. Ishii, K. Okada, M. Furuta, and T. Hirao,
誌名:Journal of Vacuum Science and Technology B, 28(4), (2010) pp. 878-881
-
題名:“High-Density Short-Length Directly Grown CNT Pattered Emitter on Glass Substrate”,
著者:H. Furuta, T. Hiramatsu, K. Kawabata, M. Furuta, A. Hatta, T. Matsuda, C. Li, and T. Hirao,
誌名:e-Journal of Surface and Nanotechnology, 8, (2010) pp. 336-339
-
題名:“Thermal Stability of ZnO Thin Films Prepared by RF-Magnetron Sputtering Evaluated by Thermal Desorption Spectroscopy.”,
著者:T. Matsuda, M. Furuta, T. Hiramatsu, H. Furuta, C. Li, and T. Hirao,
誌名:Applied Surface Science, 256, (2010) pp. 6350-6353
-
題名:"Enhanced Nucleation of Microcrystalline Silicon Thin-films Deposited by Inductively Coupled Plasma Chemical Vapor Deposition (ICP-CVD) with Low-Frequency Pulse Substrate Bias”,
著者:M. Furuta, T. Hiramatsu, and T. Hirao,
誌名:Japanese Journal of Applied Physics, 49, (2010) 050202
-
題名:“Activation Behavior of Boron Implanted Poly-Si on Glass Substrate”,
著者:M. Furuta, K. Shimamura, H. Tsubokawa, K. Tokushige, H. Furuta and T. Hirao,
誌名:Thin Solid Films, 518, (2010) pp. 4477-4481
-
題名:“Comparison of Structural and Photoluminescence Properties of ZnO Nanostructures Influenced by Gas Ratio and Substrate Bias during Radio Frequency Sputtering”,
著者:C. Li, T. Matsuda, T. Kawaharamura, H. Furuta, M. Furuta, T. Hiramatsu, T. Hirao, Y. Nakanishi, and K. Ichinomiya,
誌名:Journal of Vacuum Science and Technology B, 28, (2010) pp. C2B51-C2B55
-
題名:“Crystallinity and Resistivity of ZnO Thin Films with Indium Implantation and Post Annealing”,
著者:T. Matsuda, M. Furuta, T. Hiramatsu, H. Furuta and T. Hirao,
誌名:Journal of Vacuum Science and Technology A, 28, (2010) pp. 135-138
-
題名:“Effect of Surface Treatment of Gate-insulator on Uniformity in Bottom-gate ZnO Thin-film Transistors”,
著者:M. Furuta, T. Nakanishi, M. Kimura, T. Hiramatsu, T. Matsuda, T. Kawaharamura, H. Furuta, and T. Hirao,
誌名:Electrochemical and Solid-State Letters, 13, (2010) pp. H101-H104
-
題名:“有機光電膜とZnO TFT回路の積層構造を用いた有機撮像デバイスの原理実証実験”,
著者:瀬尾北斗、相原聡、難波正和、渡辺敏久、大竹浩、久保田節、江上典文、平松孝浩、松田時宜、古田守、新田浩士、平尾孝、
誌名:映像情報メディア学会誌, 64, (2010) pp. 365-371
-
題名:“Effect of Pulsed Substrate Bias on Film Properties of SiO2 Deposited by Inductively Coupled Plasma Chemical Vapor Deposition”,
著者:T. Hiramatsu, T. Matsuda, H. Furuta, H. Nitta, T. Kawaharamura, C. Li, M. Furuta, and T. Hirao,
誌名:Japanese Journal of Applied Physics, 49, (2010) 03CA03
-
題名:“Photo Leakage Current of ZnO TFTs in the Visible Light”,
著者:Y. Kamada, S. Fujita, T. Hiramatsu, T. Matsuda, H. Nitta, M. Furuta, and T. Hirao,
誌名:Japanese Journal of Applied Physics, 49, (2010) 03CB03
-
題名:“Thermal Stability and Sheet Resistance of Undoped ZnO Films Deposited on Insulators”,
著者:M. Furuta, T. Hiramatsu, T. Matsuda, C. Li, H. Furuta, and T. Hirao,
誌名:Electrochemical and Solid-State Letters, 12, (2009) pp. K74-K76
-
題名:“Intense Green Cathodoluminescence from Low-temperature–deposited ZnO Films with Lotus Roots Nanostructures”,
著者:C. Li, T. Kawaharamura, T. Matsuda, H. Furuta, T. Hiramatsu, M. Furuta, and T. Hirao,
誌名:Applied Physics Express (APEX), 2, (2009) 091601
-
題名:"Stacked Image Sensor with Green- and Red-Sensitive Organic Photoconductive Films Applying Zinc-Oxide Thin Film Transistors to a Signal Readout Circuit",
著者:S. Aihara, H. Seo, M. Namba, T. Watabe, H. Ohtake, M. Kubota, N. Egami, T. Hiramatsu, T. Matsuda, M. Furuta, H. Nitta and T. Hirao,
誌名:IEEE Transaction on Electron Devices, Vol. 56, No.11, (2009) pp. 2570-2576
-
題名:“Effects of Substrate on the Structural, Electrical and Optical Properties of Al-doped ZnO Films Prepared by Radio Frequency Magnetron Sputtering”,
著者:C. Li, M. Furuta, T. Matsuda, T. Hiramatsu, H. Furuta and T. Hirao,
誌名:Thin Solid Films, 517, (2009) pp. 3265-3268
-
題名:“Effect of Substrate Bias on Crystal Structure and Thermal Stability of Sputter-Deposited ZnO Films”,
著者:T. Hiramatsu, M. Furuta, H. Furuta, T. Matsuda, C. Li, and T. Hirao,
誌名:Journal of Crystal Growth, 311, (2009) pp. 282-285
-
題名:“Bottom-Gate Zinc Oxide Thin-Film Transistors (ZnO TFTs) for AM-LCDs”,
著者:T. Hirao, M. Furuta, T. Hiramatsu, T. Matsuda, C. Li, H. Furuta, H. Hokari, M. Yoshida, H. Ishii, and M. Kakegawa,
誌名:IEEE Transaction on Electron Devices, 55, (2008) pp. 3136-3142
-
題名:“Influence of Amorphous Buffer Layers on the Crystallinity of Sputter-Deposited Undoped ZnO Films”,
著者:T. Matsuda, M. Furuta, T. Hiramatsu, C. Li, H. Furuta and T. Hirao,
誌名:Journal of Crystal Growth, 310, (2008) pp. 31-35
-
題名:“Oxygen Bombardment Effects on Average Crystallite Size of Sputter-Deposited ZnO Films”,
著者:M. Furuta, T. Hiramatsu, T. Matsuda, C. Li, H. Furuta and T. Hirao,
誌名:Journal of Non-Crystalline Solids, 354, (2008) pp. 1926-1931
-
題名:“基板バイアスにより制御されたZnO薄膜の結晶性とドライエッチングにより形成される側壁形状との相関”,
著者:平松孝浩、古田守、古田寛、松田時宜、平尾孝、
誌名:真空, 50, (2007) pp. 498-501
-
題名:“RF Power and Thermal Annealing Effect on the Properties of Zinc Oxide Films Prepared by Radio Frequency Magnetron Sputtering”,
著者:C. Li, M. Furuta, T. Matsuda, T. Hiramatsu, H. Furuta and T. Hirao,
誌名:Research Letter in Material Science, 2007, (2007) pp. 26459-1~5
-
題名:“Sheet Resistance and Crystallinity of Ga- and Al- Implanted Zinc Oxide Thin Films with Post Annealing”
著者:T. Matsuda, M. Furuta, T. Hiramatsu, H. Furuta and T. Hirao,
誌名:Journal of Vacuum Science and Technology A, 25, (2007) pp. 706-710
-
題名:“Influence of Thermal Annealing on Microstructure of Zinc Oxide Films Deposited by RF Magnetron Sputtering”,
著者:T. Hiramatsu, M. Furuta, H. Furuta, T. Matsuda, and T. Hirao,
誌名:Japanese Journal of Applied Physics, 46, (2007) pp. 3319-3323
-
題名:“Effects of Energetic Particle Bombardment on the Microstructure of Zinc Oxide (ZnO) Films Deposited by rf Magnetron Sputtering”,
著者:M. Furuta, T. Hiramatsu, T. Matsuda, H. Furuta, and T. Hirao,
誌名:Japanese Journal of Applied Physics, 46, (2007) pp. 4038-4041
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題名:“Novel Top-Gate Zinc Oxide Thin-Film Transistors (ZnO-TFTs) for AM-LCDs”,
著者:T. Hirao, M. Furuta, H. Furuta, T. Matsuda, T. Hiramatsu, H. Hokari, and M. Yoshida
誌名:Journal of Society for Information Display, 15/1, (2007) pp. 17-22
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題名:“SiO2 Insulator Film Synthesized at 100 °C using Tetramethylsilane by Inductively Coupled Plasma Chemical Vapor Deposition”,
著者:H. Furuta, M. Furuta, T. Matsuda, T. Hiramatsu, and T. Hirao,
誌名:Japanese Journal of Applied Physics, 46, (2007) pp. L237-L240
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題名:“選択エッチング法によるナノサイズ炭素エミッタ形成”,
著者:青木 勝詔, 鈴木 恵友, 高梨 久美子, 石井 一久, B. S. SATYANARAYANA, 尾浦 憲治郎, 古田 寛, 古田 守, 平尾 孝
誌名:真空, 49, (2006) pp. 430-432
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題名:“Structural Analysis of High-Density Vertically Aligned Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition with Fe/Al Multilayer Catalyst”,
著者:T. Komukai, K. Aoki, H. Furuta, M. Furuta, K. Oura, and T. Hirao,
誌名:Japanese Journal of Applied Physics, 45, (2006) pp. 8988-8990
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題名:“Density Control of Carbon Nanotubes Through The Thickness of Fe/Al Multilayer Catalyst”,
著者:T. Komukai, K. Aoki, H. Furuta, M. Furuta, K. Oura, and T. Hirao,
誌名:Japanese Journal of Applied Physics, 45, (2006) pp. 6043-6045
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題名:“Low-Temperature Growth of Carbon Nanofiber by Thermal Chemical Vapor Deposition using CuNi Catalyst”,
著者:K. Aoki, T. Yamamoto, H. Furuta, T. Ikuno, S. Honda, M. Furuta, K. Oura, and T. Hirao,
誌名:Japanese Journal of Applied Physics, 45, (2006) pp. 5329-5331
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題名:“Reliability of Low-temperature Poly-Si TFTs with LDD Structures”,
著者:M. Furuta, Y. Uraoka and T. Fuyuki,
誌名:Japanese Journal of Applied Physics, 42, (2003) pp. 4257-4260
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題名:“Hydrogen Implantation Damage in Polycrystalline Silicon Thin Film Transistors Caused by Ion Doping”,
著者:M. Furuta, H. Satani, T. Terashita, T. Tamura, and Y. Tsuchihashi
誌名:Japanese Journal of Applied Physics, 41, (2002) pp. 1259-1264
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題名:“Bottom-Gate Poly-Si Thin Film Transistors using XeCl Excimer Laser Annealing and Ion Doping”,
著者:M. Furuta, T. Kawamura, T. Yoshioka, and Y. Miyata,
誌名:IEEE Transaction on Electron Devices, 40, (1993) pp. 1964-1969
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題名:“Polycrystalline Silicon Recrystallized with Excimer Laser Irradiation and Impurity Doping using Ion Doping Method“,
著者:Y. Miyata, M. Furuta, T. Yoshioka, and T. Kawamura,
誌名:Journal of Applied Physics, 73, (1993) pp. 3271-3275
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題名:“Low-Temperature Polycrystalline Silicon Thin-Film Transistors for Large-Area Liquid Crystal Display“,
著者:Y. Miyata, M. Furuta, T. Yoshioka, and T. Kawamura,
誌名:Japanese Journal of Applied Physics, 31, (1992) pp. 4559-4562
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題名:“Lateral Growth on (110) GaAs Substrates by Metalorganic Chemical Vapor Deposition”,
著者:K. Okamaoto, M. Furuta, and K. Yamaguchi,
誌名:Japanese Journal of Applied Physics, 27, (1988) pp. L437-L440
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題名:“Zn and Si Doping in {110} GaAs Epilayers Grown by Metalorganic Chemical Vapor Deposition”,
著者:K. Okamaoto, M. Furuta, and K. Yamaguchi,
誌名:Japanese Journal of Applied Physics, 27, (1988) pp. L2121-L2124